Graphical user interface for allocating multi-function resources in semiconductor wafer fabrication and method of operation

ABSTRACT

A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a process system in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system, a resource allocation controller, and a graphical user interface. The graphical user interface transforms process system information of the resource allocator into an audio-visual format to enable supervisory interaction. In one embodiment the graphical user interface provides information to reduce load conflict among multiple furnaces in semiconductor wafer fabrication.

PRIORITY CLAIM TO PRIOR PATENT APPLICATIONS

This patent application claims priority as a continuation in part patentapplication to U.S. patent application Ser. No. 10/299,949 filed on Nov.19, 2002, which claims priority to U.S. Provisional Patent ApplicationNo. 60/408,817 filed on Sep. 6, 2002. The parent patent application iscommonly owned by the assignee of the present patent application. Theparent patent application is hereby incorporated by reference into thepresent patent application for all purposes as if fully set forthherein.

CROSS REFERENCE TO RELATED APPLICATION

The present invention is related to that disclosed in the followingUnited States Non-Provisional Patent Application:

U.S. patent application Ser. No. 10/447,324, filed concurrentlyherewith, entitled “SYSTEM AND METHOD FOR ALLOCATING MULTI-FUNCTIONRESOURCES FOR A WETDECK PROCESS IN SEMICONDUCTOR WAFER FABRICATION.” Theabove patent application is commonly assigned to the assignee of thepresent invention. The disclosures in this related patent applicationare hereby incorporated by reference for all purposes as if fully setforth herein.

TECHNICAL FIELD OF THE INVENTION

The present invention is directed generally to resource allocationsystems and process control systems and, more specifically, to graphicaluser interfaces, particularly, dispatch viewers, for association withsystems for allocating multi-function resources in semiconductor waferfabrication and related methods of operation.

BACKGROUND OF THE INVENTION

Allocation of multi-function resources within resource allocation andprocess control systems may be thought of as the management (i.e.,administration, command, control, direction, governance, monitoring,regulation, etc.) of such multi-function resources (e.g., manufacturingtools, instruments, hardware, software, databases,communication/connectivity resources, transportation resources,facilities, utilities, inventories, etc.) among a variety of taskswithin a process system.

Process systems may be arranged and implemented to manage largefacilities, such as a manufacturing plant, a semiconductor fabricationfacility, a mineral or crude oil refinery, or the like, as well asrelatively smaller facilities, such as a corporate communicationsnetwork, a data repository and management system, or the like. Suchsystems may be distributed or not, and typically include numerousmodules tailored to manage various associated processes, whereinconventional means link these modules together to produce thedistributed nature of the process system. This affords increasedperformance and a capability to expand or reduce the process system tosatisfy changing needs.

Process systems are developed and tailored to satisfy wide ranges ofprocess requirements, whether local, global or otherwise, and regardlessof facility type. Such developers and users of such systems commonlyhave two principal objectives: (i) to centralize management/control ofas many sub-processes or processes as possible to improve overallefficiency, and (ii) to support a common interface that communicatesdata among various modules managing/controlling or monitoring theprocesses, and also with any such centralized controller.

Each process, or group of associated sub-processes or processes, hascertain input (e.g., data, diagnostics, feed, flow, power, etc.) andoutput (e.g., data, pressure, temperature, utilization parameters, etc.)characteristics associated therewith. These characteristics aremeasurable, and may be represented in a discernable manner.

Predictive control methodologies/techniques may be used to optimizecertain processes as a function of such characteristics. Predictivecontrol techniques may use algorithmic representations to estimatecharacteristic values (represented as parameters, variables, etc.)associated with them that can be used to better manage such processresources among a plurality of tasks.

Such optimization efforts only account mathematically for the tasksbeing performed and the process resources then used to resolve the samebased upon statistical characteristics only, thereby failing to modeland factor into the optimization effort both status and logistical data,as well as to account for human capabilities and interaction (i.e.,functions, skills, qualifications, task preferences, track records andthe like) that ultimately utilize the process resources to resolve thetasks. Conventional approaches can exhibit poor response to constantlychanging or exigent circumstances, and as such fail to cooperativelyoptimize process resources, particularly process resources capable ofperforming multiple functions. What is needed in the art is a powerfuland flexible means for dynamically analyzing and modifying processstatus in a real-time mode through allocation and reallocation ofmultifunction process resources among a plurality of tasks within aprocess system.

Using semiconductor fabrication as an example, in order to provideshortest cycle times, highest quality, timely-delivered cost-effectiveproducts that meet revenue growth plans, there is a continuous need toimprove manufacturing processes and sub-processes, including the contentand methods of delivering information to the operations staff.

Information about manufacturing tools and work in process (“WIP”)inventory are critical to the decision making process necessary tooperate a semiconductor wafer manufacturing line. With complexmulti-tool, multi-technology, multi-product resources (“multi-functionresources”), a need exists in the industry for a system and method thatallocate such multi-function resources among a plurality of tasks withinfabrication facility so as to execute a flexible process or plan thatresponds to WIP mix, resource availability changes, associate workschedule, skill sets (e.g., “queue-jumping” hot lots, special workrequests, etc.), and the like to meet the requirements of a“just-in-time” environment.

Stated more broadly, a measurement of process efficiency can be definedby how quickly demands by requesting tasks are satisfied through theallocation of process resources. Today, even though human operatorsassist in the allocation of resources to requesting tasks, decisions toallocate such resources are controlled by management (whether humanmanagement based upon periodic reports (e.g., daily, weekly, monthly or,even, quarterly), or automated management based upon periodic batcheddata, or some combination of the two) which reacts or decides based uponrelatively stale data, rather than reacting/deciding dynamically.

For example, in a wetdeck process in semiconductor wafer fabrication itis economically advantageous to simultaneously process as many waferlots as allowed by a wafer carrier, but not more than will fit into afurnace batch. Some types of wafer carriers have a carrier size oftwenty four (24) while other types of wafer carrier have a carrier sizeof up to one hundred (100) wafers. A wafer carrier of one hundred (100)wafers could be loaded to complete the batch size requirement for up tofour (4) different furnaces. The batch rules must be enforced to ensurethan all wafers get a proper recipe. An error in batching will likelyresult in many wafers having to be scrapped.

It is also important that the re-clean time window requirements beobserved when making up wafer batches. The importance of the re-cleantime window requirements can be better understood by considering thefollowing example. Assume that a first wafer lot and a second wafer lotboth need the same wetdeck recipe. Also assume that an available wetdeckhas a wetdeck carrier that is capable of holding all of the wafers fromboth wafer lots. Also assume that the first wafer lot and the secondwafer lot are destined to go to different furnaces.

Processing both of the wafer lots simultaneously is a good idea as longas the re-clean time window associated with each wafer lot will not beexceeded. Re-clean time windows can be as short as one (1) hour. Moretypically, re-clean time windows can be as long as twenty four (24)hours. The variation in the length of re-clean time windows makes theefficient management of wetdeck resources even more difficult. In somecases, the opportunity for re-cleaning is not permitted at all. Whenre-cleaning is not permitted, the wafer lots will either make to thefurnace in time or the wafer lots will be declared to be discrepantwafer lots. Depending upon the specific process involved, discrepantwafer lots may be required to be scrapped.

In any event it is very costly to re-clean material when the re-cleantime window requirement is exceeded. The cost is due to the cost ofchemicals, extra machine cycles, and the increased risk of processingerrors and inappropriate batching. The successful operation of a wetdeckprocess in semiconductor wafer fabrication involves not just the type ofmaterials used but also the timing of providing those materials.

Therefore, a need exists for a system and method for efficientlyallocating multi-function resources for a system process insemiconductor wafer fabrication. A further need exists for a processsystem and related graphical user interface (“GUI”) through whichmanagement reacts timely relative to conventional systems based upondynamic data. In particular, a need exists for GUIs, particularly,dispatch viewers, for association with systems for allocatingmulti-function resources in semiconductor wafer fabrication.

SUMMARY OF THE INVENTION

To address the above-discussed deficiencies of the prior art, it is aprimary object of the present invention to provide systems, as well asmethods of operating the same, delivering graphical user interfaces,particularly, dispatch viewers, for association with systems thatallocate multi-function resources among a plurality of tasks insemiconductor wafer fabrication.

Broadly, such systems and methodologies enable real-time processautomation through mathematical modeling of multi-function processresources (e.g., manufacturing tools, hardware, software, databases,communication/connectivity resources, transportation resources,facilities, utilities, inventories, etc.), and then allocating ones ofsuch resources to perform various tasks within the process system,commonly in accord with at least one application process. It should benoted that such systems and methodologies may be suitably arranged tomaintain a knowledge database and to modify the same to record pastexperiences thereby enabling the same to be self-learning.

In accord with the principles of the present invention, an exemplaryresource allocator is introduced that allocates such multi-functionresources among a plurality of tasks within the process system executingthe at least one application process. This resource allocator comprisesa monitoring controller, a model of the process system and a resourceallocation controller. A suitably arranged dispatch viewer is associatedwith the resource allocator.

An exemplary monitoring controller monitors measurable characteristicsassociated with the executing application process, multi-functionresources and related tasks, each of the measurable characteristicsbeing one of a status characteristic and a logistical characteristic. Anexemplary model represents mathematically the multi-function resourcesand the tasks, and defines relationships among related ones thereof as afunction of the application process (e.g., one or more applicationprocesses, resources, tasks, etc.). An exemplary resource allocationcontroller operates the model in response to the monitored measurablecharacteristics and allocates ones of the multi-function resources amongones of the tasks within the process system to efficiently execute theat least one application process.

The suitably arranged dispatch viewer, or, more generally, graphicaluser interface (GUI), is associated with the process system via theresource allocator. The dispatch viewer is operable to transformreal-time process system information into a multimedia format to enablesupervisory interaction. The supervisory interaction may be from humanmanagement, from system management (self-learning or otherwise), or fromsome suitable combination of human management and system management.

In one advantageous embodiment the graphical user interface of thepresent invention is employed in a resource allocator for use in awetdeck process in semiconductor wafer assembly. A wetdeck process iscapable of executing a plurality of wetdeck process plans.

An exemplary resource allocator operates to allocate a plurality ofmulti-function resources, or tools (e.g., furnaces (high temperatureatmospheric pressure, low pressure chemical vapor deposition, doping(bbr3, poc13, etc.), anneal, alloy, curing, etc.)); wet chemical processstations (self contained, open bath, etc.); work in process controllers(stockers, transport modules, etc.); people (equipment loaders,operators, repair technicians, etc.), among a plurality of tasks of anygiven wetdeck process plan. The resource allocator comprises amonitoring controller, a model and resource allocation controller.

The monitoring controller monitors measurable characteristics associatedwith an executing wetdeck process plan, the multi-function resources,and the related tasks. Each of the measurable characteristics is one ofa status characteristic (e.g., execution data, timing data, alert data,completion data, recipe name, sub-recipe name, idle or running, etc.) ora logistical characteristic (e.g., assignment data, availability data,capacity data, diffusion process plan data, prioritization data, processduration, queue time, alternative resource options, competing resourceoptions, skill sets, etc.).

The model is of the wetdeck process, and represents mathematically theplurality of multi-function resources and the plurality of tasks, aswell as defines relationships among related ones thereof as a functionof the wetdeck process plans.

The resource allocation controller operates the wetdeck process model inresponse to the monitored measurable characteristics and allocatescertain of the multi-function resources among certain of the tasks toefficiently execute the wetdeck process plan. The resource allocationcontroller is therefore operable to select and reselect allocated onesof the multi-function resources.

During the wetdeck process, meaning before, during and between executionof various wetdeck process plans, the resource allocation controlleroperates to modify ones of the mathematical representations in responseto the status or logistical characteristic data. In a relatedembodiment, the resource allocator comprises a data repository having atleast a knowledge database, and the resource allocator further operatesto modify the knowledge database in response to changes to or thecondition/value of the status and logistical characteristic data tothereby enable the resource allocator to be self-learning.

The graphical user interface of the present invention transforms wetdeckprocess system information of the resource allocator into anaudio-visual format to enable supervisory interaction. In oneadvantageous embodiment the graphical user interface providesinformation to reduce load conflict among multiple furnaces during theprocess of semiconductor wafer fabrication.

Before undertaking a Detailed Description of the Invention, it may beadvantageous to set forth a definition of certain words and phrases usedthroughout this patent document: the terms “include” and “comprise,” aswell as derivatives thereof, mean inclusion without limitation; the term“or,” is inclusive, meaning and/or; the phrases “associated with” and“associated therewith,” as well as derivatives thereof, may mean toinclude, be included within, interconnect with, contain, be containedwithin, connect to or with, coupled to or with, be communicable with,cooperate with, interleave, juxtapose, be proximate to, be bound to orwith, have, have a property of, or the like; the term “memory” means anystorage device, combination of storage devices, or part thereof whethercentralized or distributed, whether locally or remotely; and the terms“controller,” “processor” and “allocator” mean any device, system orpart thereof that controls at least one operation, such a device, systemor part thereof may be implemented in hardware, firmware or software, orsome combination of at least two of the same.

It should be noted that the functionality associated with any particularcontroller or allocator may be centralized or distributed, whetherlocally or remotely. In particular, a controller or allocator maycomprise one or more data processors, and associated input/outputdevices and memory that execute one or more application programs and/oran operating system program.

Additional definitions for certain words and phrases are providedthroughout this patent document, those of ordinary skill in the artshould understand that in many, if not most instances, such definitionsapply to prior uses, as well as future uses, of such defined words andphrases.

The foregoing has outlined rather broadly the features and technicaladvantages of the present invention so that those skilled in the art maybetter understand the detailed description of the invention thatfollows. Additional features and advantages of the invention will bedescribed hereinafter that form the subject of the claims of theinvention. Those skilled in the art should appreciate that they mayreadily use the conception and the specific embodiment disclosed as abasis for modifying or designing other structures for carrying out thesame purposes of the present invention. Those skilled in the art shouldalso realize that such equivalent constructions do not depart from thespirit and scope of the invention in its broadest form.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present invention, and theadvantages thereof, reference is made to the following descriptionstaken in conjunction with the accompanying drawings, wherein likenumbers designate like objects, and in which:

FIG. 1 illustrates an exemplary process system and associated resourceallocator in accordance with the principles of the present invention;

FIG. 2A illustrates a graphical user interface (“GUI”) in accord withthe principles of the present invention for use in a semiconductor waferfabrication;

FIG. 2B illustrates an icon from the GUI of FIG. 2A that represents oneof a plurality of multi-function resources in accord with the principlesof the present invention for use in a semiconductor wafer fabrication;

FIG. 3 illustrates a block diagram of a process system implemented as aninformation management system associated with the resource allocator ofFIG. 1, all in accordance with the principles of the present invention;

FIG. 4 illustrates a block diagram of a network infrastructure utilizedto implement a distributed embodiment of the process system of FIGS. 1and 3 in association with a centralized implementation of resourceallocator, all in accordance with the principles of the presentinvention;

FIG. 5 illustrates a flow diagram of an exemplary method of operatingthe process system of FIGS. 1 to 4 in accordance with the principles ofthe present invention;

FIG. 6 illustrates a conceptual block diagram of an exemplary embodimentof a resource allocator for use in a diffusion process in semiconductorwafer fabrication according to one embodiment of the present invention;

FIG. 7 schematically illustrates a plurality of wafer lots that are tobe provided to a plurality of wetdeck units and a plurality of furnacesfor heating the plurality of wafer lots after the wafer lots have beenprocessed by the wetdeck units;

FIG. 8 illustrates a conceptual block diagram of an exemplary embodimentof a resource allocator for use in a wetdeck process in semiconductorwafer fabrication according to one embodiment of the present invention;

FIG. 9 illustrates a flow diagram of an exemplary method of operatingthe system of the present invention for a wetdeck process insemiconductor wafer fabrication;

FIG. 10 illustrates an exemplary display of information provided by awetdeck planner application of the present invention for a wetdeckprocess in semiconductor wafer fabrication;

FIG. 11 illustrates an exemplary display of information provided by adispatch viewer of the present invention associated with a resourceallocator in semiconductor wafer fabrication; and

FIG. 12 illustrates an exemplary resource allocator associated with thedispatch viewer of FIG. 11 in accordance with the principles of thepresent invention.

DETAILED DESCRIPTION OF THE INVENTION

FIGS. 1 through 12, discussed below, and the various embodiments used todescribe the principles of the present invention in this patentdocument, are by way of illustration only and should not be construed inany way to limit the scope of the invention. Those skilled in the artwill understand that the principles of the present invention may beimplemented in any suitably arranged system, as well as method ofoperating the same, for allocating a plurality of resources, bothprocess and human resources, among a plurality of tasks within a processsystem.

Turning initially to FIG. 1, illustrated is an exemplary process system(generally designated 100), which includes a plurality of applicationprocesses 105. For purposes hereof, “application process” is definedbroadly as a program or a part of a program that can execute, whetherindependently of other parts or not, and is designed for or to meet theneeds of the process system 100. An application process may suitablyconsist of low-, mid- or high-level programs or parts thereof thatinteract with process system 100 that is associated with a resourceallocator (generally designated 110), all in accordance with theprinciples of the present invention. For purposes hereof, the phrase“process system” means any computer processing system, network ofcomputer processing systems, or portion thereof that is operable tomonitor, control or otherwise supervise a process (e.g., informationmanagement system, manufacturing plant (e.g., semiconductorfabrication), refinery, hotel, restaurant, traffic control,transportation control, emergency services (e.g., police, fire, medical,military, etc.), and the like).

According to one advantageous embodiment hereof, process system 100 is asemiconductor fabrication facility that is operable to handle multipleand varied application processes, or plans, associated with complexmulti-function resources (e.g., tools (including varying technologies))and tasks to manufacture multiple and widely varying semiconductorproducts. System 100 may, in whole or in part, be a network-based,real-time, visualized, intelligent (i.e., self-learning) system, andinclude control enhancements for industries, whether manufacturing orotherwise, that require timely delivery of services, products or otherresources.

Exemplary resource allocator 110 is operable to allocate a plurality ofmulti-function resources 115 among a plurality of tasks 120 withinprocess system 100, wherein, for purposes of illustration, exemplarymulti-function resources 115 may suitably be any tool, device or othersystem used in the manufacture process of semiconductor products.According to one advantageous embodiment hereof, resource allocator 110is a general processor that is operable to accept variable servicerequests and to intelligently apply the required resource(s) to addresssuch requests. Resource allocator 110 illustratively includes a memory125, a monitoring controller 130, and a resource allocation controller135. Resource allocator 110 is associated with a graphical userinterface 140 (“GUI” 140). GUI 140 provides graphical informationcontrols (discussed with reference to FIGS. 2A and 2B) thatcooperatively offer enhancements of real-time, visual, intelligent, andcontrol functions, possibly through web-base connectivity.

Exemplary memory 125 is operable to store a model 145 of process system100. Exemplary model 145 mathematically represents application processes105, multi-function resources 115, and tasks 120, and also definesvarious relationships among related ones of application processes 105,multi-function resources 115, and tasks 120. According to oneadvantageous embodiment hereof, memory 125 includes a plurality ofdatabases (shown in FIG. 3) used, for instance, for service/function,control and knowledge.

A service/function database may be operable to store informationregarding customers, networks, transactions, resources, communicationsor the like. A control database may be operable to store algorithms,rules, key elements for decision-making or the like. A knowledgedatabase may be operable to provide task related intelligent informationto help make optimal decisions, and to acquire and accumulate experiencethrough evaluating results (i.e., artificial intelligence, expert systemanalysis, neural networks, etc.).

Exemplary monitoring controller 130 is operable to monitor measurablecharacteristics associated with ones of application processes 105,multi-function resources 115, and tasks 120. According to oneadvantageous embodiment hereof, monitoring controller 130 is a real-timemonitor of updated status or logistical data of resources and tasks, andenables human interaction online with other subsystems, allowing a humaninterface to respond to, modify, update or over-ride the automateddecision-making processes. Each of the measurable characteristics is oneof a status characteristic or a logistical characteristic.

Exemplary resource allocation controller 135 is responsive to ones ofthe monitored measurable characteristics and may be operable to: (i)operate the model; (ii) modify ones of the mathematical representationsof application processes 105, multi-function resources 115, tasks 120,and the defined relationships among related ones of applicationprocesses 105, multi-function resources 115, and tasks 120; and (iii)allocate ones of resources 115 among ones of tasks 120 within processsystem 100.

According to one advantageous embodiment hereof, broadly, resourceallocation controller 135 allocates ones of multi-function resources 115among ones of tasks 120 within process system 100 in response to themonitored measurable characteristics to efficiently execute one or moreapplication processes 105, and, more specifically, operates to interactwith available resources and tasks to generate and manage the requiredtransactions within one or more application processes 105 (noting, forinstance, that measurable characteristics of resource allocationcontroller 135 may be associated with management of customers, networks,resources, and communications, such as service objectives, metrics, andmeasurements).

Exemplary GUT 140 is a user interface that is operable to transformreal-time process system information into an audio or visual format toenable supervisory interaction. According to one advantageous embodimenthereof, GUT 140 is operable to visualize the data and status of externalresources, service requests as well as on-going transactions by usinggraphic displays, multimedia equipment to provide real-time data as wellas historical and statistical information with human interaction.

Turning to FIG. 2A illustrated is an exemplary GUT 140 in accord withthe principles of the present invention for use in a semiconductor waferfabrication. GUT 140 includes a plurality of icons 200 representing aplurality of multi-function resources 115. In wafer fabrication, themission is to provide the shortest cycle time, highest quality, costeffective products on time to continually meet revenue growth plans.This causes an on-going need to continuously improve manufacturingprocesses including the content and methods of delivering information toan operations staff.

Status information about the manufacturing tools and work in processinventory are often critical to making decisions needed to successfullyoperate a wafer manufacturing line on a daily basis. In executing anapplication process, or plan, it is critical to know what is plannednext. This is a time-consuming communication exercise. These plans maybe flexible in responding to WIP mix, tool availability changes,associated work schedules and skill sets. A “just in time” environmentis responsive to “queue jumping hot lots”, or “Static WIP” as well asspecial work requests for certain portions of lots that make theplanning process more difficult. Being able to project output by the“end of business” makes for its own special status requirements whenattempting to measure turns and operational outputs.

Real-time information is preferred to as updated batch reporting, andwhen combined with GUI 140 interface, operational staff productivityincreases significantly. In one implementation, resource, or tool-level,status data is updated automatically every minute while the logisticalinformation is updated every other minute. The exemplary running wheelicon is easily contrasted between “on” and “off” (or static) used todisplay an “idle” furnace making for quick interpretation.

According to this implementation, status data changes as the tool itselfprogresses through process sub-steps, and is sensed from the sensors,timers, controllers (e.g., mass flow controllers, thermocouples,countdown buffers, etc.), etc. Status data may suitably be modified byone resource or tool at a time and changes in logistical data do notdirectly cause a change in status data. Logistical data is typicallydigital in nature and arguably comprehends conditions not residing onthe resource or tool itself (e.g., number of lots, operatoridentification, plan state, etc.). The logistical data of a group ofresources or tools may change based on a status change of any oneresource or tool, a task, an application process, a lot of material, orthe like.

Many resources, such as furnaces, for example, can be sub-divided intosmaller logical workgroups arrangements or into process focus areagroups (e.g., clean oxidation). An exemplary display for each tube'sinformation is a combination of tool and logistical level data in astandardized format that includes:

-   -   tool name, tool focus area assignment, idle or running, up or        down, ownership (e.g., Prod, Eng, Mnt), process running        including the sub-routine level, time remaining, time of        completion, number of wafers in process, number of wafers        available to process, number of wafers in next application        process (or plan), next process planned, originator of next        application process, rank of next application process in        relation to dispatching system.

Turning to FIG. 2B, illustrated is an exemplary icon that represents oneof a plurality of multi-function resources 115 in accord with theprinciples of the present invention for use in a semiconductor waferfabrication. Additional features include special symbols that appear ifthe tool develops an equipment error condition, as this may cause a needfor a modification of a loading plan, as an example. Buttons enablequeries of the factory logistical data including qualificationschedules, last “X” hour history, whole area WIP (e.g., running, readyto load, ready to pre-clean, etc.), application processes for othertools including the unload schedules for work currently in process.Button bars may also include launch points for viewing either thecurrent run data itself or in combination with historical runs of thisor any other furnace, according to this example.

Turning next to FIGS. 3 and 4, introduced is an information managementsystem embodiment of process system 100 of FIG. 1. Exemplary processsystem 100 is introduced by way of illustration only to describe theprinciples of the present invention and should not be construed in anyway to limit the scope of the invention. Illustrated is a conceptualblock diagram of process system 100 associated with a service operationresource allocator 110, all in accordance with the principles of thepresent invention. Exemplary process system 100, in addition to serviceoperation resource allocator 110, also includes a plurality ofapplication processes 105, namely, a service customer block, and aservice management block.

Exemplary service customer block may be a person or a controller; forinstance, service customer block may suitably be a person using acomputer that is associated with an intranet or the Internet, or it maybe an intelligent input/output device associated with equipment to sendand receive data using connectivity.

Exemplary service management block includes a plurality of GUIs 140 thatprovide user interfaces operable to transform real-time information intoan audio or visual format to enable supervisory interaction. Servicemanagement block is operable to enable supervisory interaction withflexibility to visualize and control the entire service process flexibly(in a related embodiment, such supervisory interaction may suitably bein detail or in general with zoom in/out functions in a real-time mode).

Exemplary service operation block 110 is a resource allocator that isoperable to allocate a plurality of service resources 115 among aplurality of tasks 120 within process system 100, Service resources 115include multifunction resources, which may include definitions of humanresources based upon services, functions, activities, skills,qualifications, task preferences, track records and the like. Exemplaryhuman resources may include service staff that work with customers orservice requests, such as waiters, mechanics, plumbers, painters,electricians, soldiers, technicians, engineers, etc. Exemplary humanresources may also include service coordinators, system operators andadministrators that support the operations, such as accountants,purchase agents, auditors, receptionists, secretaries, controllers,servicemen, network administrators, etc. Exemplary human resources mayalso include service managers, system managers, and operation managersthat manage the process system and make business and operationsdecisions, such as information technology (“IT”) managers, policechiefs, hotel managers, restaurant managers, store managers, officers,executives, etc.

The process resources may suitably be classified into eight categories,namely, tools, hardware, software, databases, communication/connectivityresources, transportation resources, facilities, utilities, andinventories. Exemplary hardware resources include computers, networkdevices such as switches/routers/hubs, digital/analog sensors, cables,meters, monitors, scopes, audio/video devices, special service tools,etc. Exemplary software resources include operation systems, networksystems, database systems, application programs, graphics interfaces,system utilities, special applications such as artificial intelligence,neural net, system control and data acquisition, etc.

Exemplary data resources include three databases, namely, (i) servicedatabases 210 that maintain service objects (customers/equipment),service transactions, networks, resources, and communications, (ii)control databases 220 that maintain key attributes, algorithms,instructions, mathematics and rules that manage, monitor and control theoperations, and (iii) knowledge databases 225 that maintain on-goingreal-time knowledge, information and experiences compiling for resourceretention and self-learning process.

Exemplary communication/connectivity resources include local-area andwide-area networks, Internet, telephones/facsimile, mail, etc. Exemplarytransportation resources include trucks, cars, boats, airplanes, bikes,motorcycles, railroads, space shuttles, balloons, military vehicles,all-terrain vehicles, satellites, etc. Exemplary technology resourcesinclude service automation technology that combines major technologyareas, namely, (i) network technologies in office automation, (ii) humanmachine interface (“HMI”) technologies in industrial automation, and(iii) artificial intelligent technologies. Exemplary facilitiesresources include computer control/monitor/server rooms, labs,workrooms, offices, towers/antenna, machines/tools, piping, etc.Exemplary utilities resources include electricity, water, fuel, air,chemicals, automated warehousing, distribution systems/gatheringsystems, etc. Exemplary inventory resources include supplies, materials,peripherals, components, ammunition, etc.

An important aspect of the illustrated embodiment is that serviceoperation block 110 provides systematic operation with automatic andresponsive control of service activities based on real-time service dataand built-in intelligent decisions from model 145 of FIG. 1. Routinedecisions are made by service automation while service operations areongoing. The management is able, via GUIs 140, to make responsivedecisions and allocate or utilize service intelligently based on thereal-time graphics-enhanced information.

Service operation block 110 is illustratively associated with aplurality of service resources 115 and a plurality of service controls205. Exemplary service resources 115 may suitably include tools,hardware, software, information or facilities, all of which are to beapplied to service activities. Exemplary service controls 205 maysuitably include monitoring controller 130, resource allocationcontroller 135, and model 145, all of FIG. 1, that work cooperatively toautomatically issue service instructions according to defined rules ofmodel 145.

Service control 205 therefore monitors and controls the service resourceallocation and utilization as well as service level and matrix for theservice operation. Model 145 of service control 205 again mathematicallyrepresents application processes 105, service resources 115, and tasks120, and also defines various relationships among related ones of thesame, and includes a service database 210, a control database 220 andknowledge database 225. Any suitably arranged mathematicalrepresentation may be used for model 145 or, for that matter, any of themeasurable characteristics. Those skilled in the art will readilyrecognize that such mathematical representations will often beapplication dependent. Such measurable characteristics may be eitherstatus characteristics or logistical characteristics, and are used toexecute model 145 to efficiently allocate resources.

Exemplary service database 210 is operable to store real-timeinformation regarding service customers 105 and service activities.Service database 210 provides information of service activities toservice resources 115 through a plurality of service queues. Servicedatabase 210 also feeds real-time information to control database 220.According to the present embodiment, service database 210 may suitablybe a relational database with flat file structure containing data in atwo-dimensional table format. Exemplary control database 220 is operableto store consolidated real-time key attributes of information fromservice database 210 and also stores pre-defined algorithms(instructions and rules associated with monitoring controller 130 andresource allocation controller 135). Instructions can be automaticallyexecuted according to the rules and real-time key attributes. Servicecontrol 205 works with control database 220 to carry out definedinstructions. According to the present embodiment, control database 220is a data file with special format that contains key data and algorithms(instructions and rules associated with monitoring controller 130 andresource allocation controller 135).

Exemplary knowledge database 225 is operable as a central repository ofqualitative and quantitative information to develop standards ofperformance in activities that are common regardless of industry.Knowledge data that would serve as a reference point for performance andprocedural improvement to provide task related intelligent informationused to make decisions optimally, and to acquire and accumulateexperience through evaluating results (i.e., artificial intelligence,expert system analysis, neural networks, etc.).

An important aspect of the illustrated embodiment is that controldatabase 220 serves to provide information service management withmultimedia, and control enhancements based on real-time information. Insummary, using service database 210, control database 220 and knowledgedatabase 225, resource allocator 110 is operable to allocate a pluralityof multifunction service resources 115 among a plurality of tasks 120within process system 100.

Turning now to FIG. 4, illustrated is a conceptual block diagram of anexemplary network infrastructure utilized to implement a distributedembodiment of process system 100 in association with a centralizedimplementation of service operation resource allocator 110. Exemplarydistributed process system 100 includes a plurality of applicationprocesses 105, including LAN users 300, intelligent devices 305 (e.g.,personal data assistants (“PDAs”), two-way messaging devices, etc.), WANusers 310, Internet users 315, and the like. Those of ordinary skill inthe art will recognize that this embodiment and other functionallyequivalent embodiments may suitably be implemented by a variety ofmethods using many different computer, or processing, system platforms.Conventional computer and processing system architecture is more fullydiscussed in Computer Organization and Architecture, by WilliamStallings, MacMillan Publishing Co. (3^(rd) ed. 1993); conventionalprocessing system network design is more fully discussed in Data NetworkDesign, by Darren L. Spohn, McGraw-Hill, Inc. (1993); and conventionaldata communications is more fully discussed in Data CommunicationsPrinciples, by R. D. Gitlin, J. F. Hayes and S. B. Weinstein, PlenumPress (1992) and in The Irwin Handbook of Telecommunications, by JamesHarry Green, Irwin Professional Publishing (2^(nd) ed. 1992). Each ofthe foregoing publications is incorporated herein by reference for allpurposes.

Broadly, process system 100 allocates a plurality of multifunctionresources among a plurality of tasks thereby enabling real-time processautomation through mathematical modeling of the process resources 115and tasks 120, and then allocating ones of such resources 115 to performvarious tasks 120 within the process system 100. For the purposes of theillustrated embodiment of FIG. 4, tasks are divided into threecategories, namely, service requests, service dispatches and informationsharing. A service request may suitably be stored in service databases210 with priority, location, contents, requirements, contacts, etc. Aservice dispatch may suitably be stored in control databases 220 andknowledge databases 225 with service level objectives, servicemetrics/measurements, transaction/actions, status and situations,decision-making processes with real-time responsive, pre-defined,programmed, intelligent, knowledge/experience retention andself-learning characters. Information sharing is a request for computergenerated audio/video and print report, e-based, real-time,graphical/visualized, etc.

Turning next to FIG. 5, illustrated is a flow diagram (generallydesignated 500) of an exemplary method of operating process system 100of FIGS. 1 to 4, all in accord with the principles of the presentinvention. For purposes of illustration, concurrent reference is made toembodiment disclosed with reference to FIG. 1. It is beneficial toassume that process system 100 is instantiated and fully operational,and for illustrative purposes directed to a raw material refiningenvironment. Further, for simplicity, assume that there are a plethoraof multifunction resources, including human resources. Thus, exemplaryprocess system 100 controls processing raw materials, and likelycontrols a control center and associated process stages (not shown;e.g., application processes 105).

A first multi-function resource 115 might include raw material grindersthat receive a feed of raw material and grind the same, such as by usinga pulverizer or a grinding wheel, into smaller particles of rawmaterial. A second multi-function resource 115 might include a washerthat receives the ground raw materials and cleans the same to removeresidue from the first stage. A third multi-function resource 115 mightinclude separators that receive the ground, washed raw materials andseparate the same into desired minerals and any remaining raw materials.Since this process system and related facility are provided for purposesof illustration only and the principles of such a facility are wellknown, further discussion of the same is beyond the scope of this patentdocument and unnecessary.

To begin, resource allocator 110 stores a model 145 of process system100 in memory (process step 505). Model 145 mathematically representsmultifunction resources 115, the process resources, the applicationprocesses 105 (i.e., the control for the grinders, separators andwashers, etc.), and relationships among related ones thereof. Resourceallocator 110 then monitors these measurable characteristics andreceives service requests (process step 510), and, for the presentexample, from a particular grinder. The measurable characteristics maybe status or logistical.

In response to measurable characteristics causing a request for serviceof the subject grinder, resource allocator 110 evaluates the alternateresources available and allocates one to provide the same function,along with process resources that may be necessary and appropriate tocomplete the same (process step 515). Resource allocator 110, inresponse to the servicing of the task, modifies ones of the mathematicalrepresentations, first indicating that the resource is occupied andpossibly indicating the quality with which the task was completed(process step 520).

According to the illustrated embodiment, resource allocator 110 modifiesknowledge database 225 to provide updated task related information tohelp make future decisions concerning the grinder, the allocatedalternative grinder, and possibly any human resource used to service thesame, etc., both intelligently and optimally. Resource allocator 110thereby acquires and accumulates experience through evaluating results(i.e., artificial intelligence, expert system analysis, neural networkanalysis, etc.). Thus, in a later scenario, should this samemultifunction resource 115 be otherwise occupied with another task andthis grinder requires a similar service, resource allocator 110 cansuitably utilize dynamic knowledge database 225 evaluate availableresources 115 to decide whether to reallocate this same grinder resource115 to the task based upon past experience recorded in the associatedmeasurable characteristics or to allocate another resource to the taskleft uncompleted. Again, multifunction resources, both process andhuman, are re-usable, re-directable for “next” requests throughintelligent decision making sub-process of experience accumulation,analysis, optimization and self-learning. Knowledge database 225operates as a central repository of knowledge data, capturingqualitative and quantitative information to develop standards ofperformance in activities that are common regardless of industry.

Turning to FIG. 6, illustrated is a conceptual block diagram of anexemplary embodiment of a resource allocator 610 for use in a diffusionprocess 605 in semiconductor wafer fabrication 600. The diffusionprocesses in semiconductor wafer fabrication are well known and, for thepurposes hereof, may again be described as a process of depositing adopant material onto a silicone substrate and diffusing the dopantmaterial into the silicone substrate via thermal agitation.

According to the illustrated embodiment, diffusion process 605 isoperable to execute a plurality of diffusion process plans. Resourceallocator 610 operates to allocate a plurality of multi-functionresources or tools among a plurality of tasks of any given diffusionprocess plan. Resource allocator 610 comprises a monitoring controller620, resource allocation controller 625, a model 630, and a graphicaluser interface 640.

Exemplary monitoring controller 620 monitors measurable characteristicsassociated with an executing diffusion process plan, the multi-functionresources, and the related tasks. Each of the measurable characteristicsis one of a status characteristic or a logistical characteristic.Exemplary model 630 is of diffusion process 605, and representsmathematically the plurality of multi-function resources and theplurality of tasks, as well as defines relationships among related onesthereof as a function of the diffusion process plans.

Exemplary resource allocation controller 625 operates the diffusionprocess model 630 in response to the monitored measurablecharacteristics and allocates certain of the multi-function resourcesamong certain of the tasks to efficiently execute the diffusion processplan. Resource allocation controller 625 is therefore operable to selectand reselect allocated ones of the multi-function resources among onesof the tasks in response to the monitored measurable characteristics.

During the diffusion process, meaning before, during and betweenexecution of various diffusion process plans, resource allocationcontroller 625 operates to modify ones of the mathematicalrepresentations in response to the status or logistical characteristicdata.

The illustrated resource allocator 610 also comprises a data repository,or memory 615, having at least a knowledge database 635. Resourceallocator 610 further operates to modify knowledge database 635 inresponse to changes to or the condition/value of the status andlogistical characteristic data to thereby enable the resource allocatorto be self-learning.

In operation, resource allocator 610 allocates the multi-functionresources among the tasks within diffusion process 605 that executes oneor more diffusion process plans. Initially, and continuously, monitoringcontroller 620 monitors measurable characteristics that are associatedwith an at least one executing diffusion process plan, themulti-function resources, and the tasks. Each of the measurablecharacteristics is either status a characteristic or a logisticalcharacteristic.

Model 630 of diffusion process 605 is instantiated to mathematicallyrepresent the multi-function resources and tasks of diffusion process605, and to define relationships among related ones thereof as afunction of the at least one diffusion process plan.

Resource allocation controller 625 operates model 630 in response to themonitored measurable characteristics, and allocates ones of themulti-function resources among ones of the tasks within diffusionprocess 605 to efficiently execute at least one diffusion process plan.

One advantageous embodiment of the present invention comprises a systemand method for allocating multi-function resources during a wetdeckprocess in semiconductor wafer fabrication 600. The wetdeck process insemiconductor wafer fabrication is well known in the art.

FIG. 7 schematically illustrates a plurality 700 of N wafer lots thatare to be provided to a plurality of M wetdeck units. The plurality 700of N wafer lots shown in FIG. 7 comprises wafer lot 1 (designated withreference numeral 705), wafer lot 2 (designated with reference numeral710), and wafer lot N (designated with reference numeral 715). Theplurality of M wetdeck units shown in FIG. 7 comprises wetdeck unit 1(designated with reference numeral 720), wetdeck unit 2 (designated withreference numeral 725), and wetdeck unit M (designated with referencenumeral 730). Any one of the plurality of wafer lots (705, 710, 715) maybe assigned to any one of the plurality of wetdeck units (720, 725,730).

After a wafer lot has been processed by a wetdeck unit, the wafer lot issent to a furnace for heat treatment. FIG. 7 schematically illustrates aplurality of P furnaces to which the wafer lots may be sent from thewetdeck units. The plurality of P furnaces shown in FIG. 7 comprisesfurnace 1 (designated with reference numeral 735), furnace 2 (designatedwith reference numeral 740), and furnace P (designated with referencenumeral 745). Any one of the plurality of wetdeck units (720, 725, 730)may send a wafer lot to any one of the plurality of furnaces (735, 740,745).

FIG. 8 illustrates is a conceptual block diagram of an exemplaryembodiment of a resource allocator 610 for use in a wetdeck process 805in semiconductor wafer fabrication 600. According to the illustratedembodiment, wetdeck process 805 is operable to execute a plurality ofwetdeck process plans. Resource allocator 610 operates to allocate aplurality of multi-function resources or tools among a plurality oftasks of any given wetdeck process plan. Resource allocator 610comprises a monitoring controller 620, resource allocation controller625, a model 630, and a graphical user interface 640. Model 630comprises a software application entitled Wetdeck Planner 810. WetdeckPlanner 810 is shown in model 630 of FIG. 8 as a block entitled “WDP.”Wetdeck Planner 810 comprises computer instructions that providescheduling information for providing a plurality of wafer lots to aplurality of wetdeck units and to a plurality of furnaces.

Exemplary monitoring controller 620 monitors measurable characteristicsassociated with an executing wetdeck process plan, the multi-functionresources, and the related tasks. Each of the measurable characteristicsis one of a status characteristic or a logistical characteristic.Exemplary model 630 is of wetdeck process 805. Exemplary model 630mathematically represents the plurality of multi-function resources andthe plurality of tasks, as well as defines relationships among relatedones thereof as a function of the wetdeck process plans.

Exemplary resource allocation controller 625 operates the wetdeckprocess model 630 in response to the monitored measurablecharacteristics and allocates certain of the multi-function resourcesamong certain of the tasks to efficiently execute the wetdeck processplan. Resource allocation controller 625 is therefore operable to selectand reselect allocated ones of the multi-function resources among onesof the tasks in response to the monitored measurable characteristics.

During the wetdeck process, meaning before, during and between executionof various wetdeck process plans, resource allocation controller 625operates to modify ones of the mathematical representations in responseto the status or logistical characteristic data.

The illustrated resource allocator 610 also comprises a data repository,or memory 615, having at least a knowledge database 635. Resourceallocator 610 further operates to modify knowledge database 635 inresponse to changes to or the condition/value of the status andlogistical characteristic data to thereby enable the resource allocator610 to be self-learning.

In operation, resource allocator 610 allocates the multi-functionresources among the tasks within wetdeck process 805 that executes oneor more wetdeck process plans. Initially, and continuously, monitoringcontroller 620 monitors measurable characteristics that are associatedwith an at least one executing wetdeck process plan, the multi-functionresources, and the tasks. Each of the measurable characteristics iseither status a characteristic or a logistical characteristic.

Model 630 of wetdeck process 805 is instantiated to mathematicallyrepresent the multi-function resources and tasks of wetdeck process 805,and to define relationships among related ones thereof as a function ofthe at least one wetdeck process plan. Model 630 of wetdeck process 805operates Wetdeck Planner 810 to assist in scheduling the operation ofthe steps of wetdeck process 805.

Resource allocation controller 625 operates model 630 in response to themonitored measurable characteristics, and allocates ones of themulti-function resources among ones of the tasks within wetdeck process805 to efficiently execute at least one wetdeck process plan.

FIG. 9 is a flow diagram (generally designated 900) of an exemplarymethod of operating process system 100 of the present invention forwetdeck process 805 in semiconductor wafer fabrication 600. For purposesof illustration, concurrent reference is made to embodiment disclosedwith reference to FIG. 1 and with reference to FIG. 8. It is beneficialto assume that process system 100 is instantiated and fully operational,and for illustrative purposes directed to a semiconductor waferfabrication environment.

Resource allocator 610 stores a model 630 for wetdeck process 805 inmemory 615 (process step 905). Model 630 mathematically representsmultifunction resources 115, the process resources, the applicationprocesses 105, and relationships among related ones thereof. Resourceallocator 610 stores Wetdeck Planner 810 in model 630 (process step910). Resource allocator 610 then monitors the measurablecharacteristics for wetdeck process 805 and receives service requests(process step 915). The measurable characteristics of wetdeck process805 may be status or logistical.

In response to measurable characteristics causing a request for service,resource allocator 610 evaluates the alternate resources available andallocates one to provide the same function, along with process resourcesthat may be necessary and appropriate to complete the same (process step920). Resource allocator 610, in response to the servicing of the task,modifies ones of the mathematical representations, first indicating thatthe resource is occupied and possibly indicating the quality with whichthe task was completed (process step 925).

According to the illustrated embodiment, resource allocator 610 modifiesknowledge database 635 to provide updated task related information tohelp make future decisions concerning the resources for wetdeck process805, and possibly any human resource used to provide service, etc., bothintelligently and optimally. Resource allocator 610 thereby acquires andaccumulates experience through evaluating results for wetdeck process805 (i.e., artificial intelligence, expert system analysis, neuralnetwork analysis, etc.). Multifunction resources, both process andhuman, are re-usable, re-directable for “next” requests throughintelligent decision making sub-process of experience accumulation,analysis, optimization and self-learning. Knowledge database 635operates as a central repository of knowledge data, capturingqualitative and quantitative information to develop standards ofperformance in activities that are common regardless of industry.

FIG. 10 illustrates an exemplary display 1000 of information provided byWetdeck Planner 810. The information shown in display 1000 may bedisplayed on any type of display device (e.g., GUI 640). The display1000 comprises a plurality of columns (designated in FIG. 10 withletters A through M) and a plurality of rows. Each row comprisesinformation that relates to a single wafer lot.

Column A of display 1000 is entitled “wetdeck.” Column A displays thewetdeck entity name (or names) that is allowed by specification toprocess a desired recipe. Multiple wetdecks within Column A are sortedalphabetically.

Column B of display 1000 is entitled “wd_(—)recipe.” Column B displaysthe name of the recipe used for the wafer lot. An Integrated SchedulingSystem (“ISS”) query uses a General Table System (“GTS”) table (i.e.,SMS_(—)FURN_(—)REC) within the workstream that controls the wetdeckrecipe download as an electronic source of the recipe name containedwithin a specification like (TE)PC-1164S-SITE.

Column C of display 1000 is entitled “Furnace_(—)Ready.” Column C givesthe date and time that a furnace (listed in Column D) will be ready toload new material. Delays in getting the wafer lot to a specific furnaceresult in lost productivity, higher cycle times and increasedmanufacturing costs.

Column D of display 1000 is entitled “entity.” Column D gives the nameof the specific furnace to which the wafer lot is to be delivered.

Column E of display 1000 is entitled “DIFF_(—)PLAN.” Column D gives thename of the process that has been logged as the next process to run onthe specific furnace named in Column D. The process is taken from theworkstream transaction LVNE event DIFF PLAN.

Column F of display 1000 is entitled “lot_(—)number.” Column F gives thelot number of the specific wafer lot at the desired process step to addto the furnace load.

Column G of display 1000 is entitled “Wafers.” Column G gives the numberof silicon slices within the specific wafer lot.

Column H of display 1000 is entitled “logged_(—)to_(—)diff.” Column Hgives the date and time when the wafer lot was first made available forwetdeck processing. The date and time given by Column H is the date andtime when the queue time starts in the diffusion area (e.g., when thewafer lot is moved out of the etch area). This does not mean that thewafer lot has physically arrived, but the wafer lot may be in transit orlocated within a stocker.

Column I of display 1000 is entitled “prior_(—)quad.” Column Iidentifies the manufacturing area that is sending the wafer lot to thewetdeck for cleaning. The information in Column I is used with theinformation in Column H to identify delivery issues to the wetdecks.

Column J of display 1000 is entitled “step.” Column J gives the numberof the script step to indicate the next transaction for the wafer lot.Lot batching requires the wafer lots to be at the same step number.

Column K of display 1000 is entitled “PRIORITY_(—)CLASS.” Column K givesthe priority classification of the wafer lot. The Dispatch List (“DLIS”)priority for each wafer lot represents the urgency of processing onewafer lot over another at the same process flow step.

Column L of display 1000 is entitled “CLEANED.” Column L gives thenumber of wafers from other wafer lots that are already at the furnacestation for loading in the particular batch.

Column M of display 1000 is entitled “BATCH_(—)SPACE.” Column M givesthe remaining available slots within a given furnace run. The logic ofWetdeck Planner 810 attempts to fill each load without going over themaximum load size as indicated in specifications like (TE)PC-1164C-SITE.

The information set forth in Columns A through M may be read in a rowthat represents a single wafer lot. Each row in display 1000 representsone wafer lot (Column F) that matches the criteria to be run within afurnace run in the furnace named in Column D. The highest priority waferlots (Column K) that will not exceed the available batch space (ColumnM) are listed.

The rows are ordered first by which wetdeck or wetdecks (Column A) areallowed to process the specific recipe (Column B) need for each waferlot. The rows are then sub-ordered by the time when the requiringfurnace will be available to process the wafer lot (Column C).

In the example shown in display 1000 the first three rows contain waferlots that are processed in the wetdeck named 2WD 11, but use twodifferent recipes (Column B). The two recipes cannot be combined forsimultaneous processing in a wetdeck carrier. The first two wafer lotsare headed for the furnace named FURN T3. FURN T3 will be ready for thewafer lots at 11:27:13 on Jan. 28, 2003 (Column C). The third wafer lotis headed for the furnace named FURN U2. FURN U2 will be ready for thethird wafer lot later at 12:05:09 on Jan. 28, 2003 (Column C). Bothfurnaces (FURN T3 and FURN U2) have other material already cleaned andwaiting at the furnace stations. FURN T3 has 94 wafers and FURN U2 has47 wafers. These top three wafer lots will fit within the maximum loadsize allowed. Failing to get the wafer lots to the furnaces will eithercause loss of time while waiting or, more likely, cause additional “lessthan full” runs. Either way, failing to get the wafer lots to thefurnaces will result in lost productivity, higher manufacturing costs,and higher cycle times.

FIG. 11 illustrates an exemplary display 1100 of information provided bya dispatch viewer (designated 1200 in FIG. 12) of resource allocator110, which may be displayed on any type of display device (e.g., GUI140, GUI 640, etc.). The display 1100 comprises a plurality of columns(designated in FIG. 11 with letters A through O) and a plurality ofrows. Each row comprises information that relates to a single resource115.

For purposes of illustration, concurrent reference is made to therespective embodiments disclosed with reference to FIGS. 1, 6 and 8. Itis beneficial to assume that process system 100 is instantiated andfully operational, and for illustrative purposes directed to asemiconductor wafer fabrication environment.

Exemplary dispatch viewer 1200 is implemented in software and operatesto generate an interface that provides graphical information controlsthat cooperatively offer enhancements of real-time, visual, intelligent,and control functions, possibly through web-base connectivity. Stateddifferently, dispatch viewer 1200 is an interface that is operable totransform real-time process system information into an audio or visualformat to enable supervisory interaction. According to one advantageousembodiment hereof, dispatch viewer 1200 is operable to visualize thedata and status of external resources, service requests, as well ason-going transactions by using graphic displays, multimedia equipment toprovide real-time data, as well as historical and statisticalinformation with management (whether human management, automatedmanagement, or some combination of the two).

Via dispatch viewer 1200, management operates to efficiently useresources 115, here, batch tools, such as furnaces, by collecting andproviding information that enhances return on equipment investment. Onesuch enhancement is to reduce “load conflict” among multiple furnaces115.

With respect to resources 115 representing furnaces, resource allocator110 enhances short-interval scheduling by providing detailed andup-to-date information about the WIP (e.g., down to wafer level perlot), queue time, priority, maximum batch size, percentage full batch,and other qualified/capable tool listings. Dispatch viewer 1200 enablesmore efficient batching when decisions are needed regarding multiplerecipe choices amongst the WIP in queue by showing inventory alreadyassigned to other similar tools. Dispatch viewer 1200 may advantageouslybe available to management via “thin client” technology.

According to the illustrated embodiment, real-time information ispreferred to updated batch reporting, and when combined with GUI 140interface, operational staff productivity increases significantly.Again, resource, or tool-level, here, furnace 115, status data isupdated automatically every minute while the logistical information isupdated every other minute.

Again, status data may change as the tool progresses through processsub-steps, and is sensed from the sensors, timers, controllers, etc.Status data may suitably be modified by one resource or tool at a timeand changes in logistical data do not directly cause a change in statusdata. Logistical data comprehends conditions not residing on theresource or tool itself (e.g., number of lots, operator identification,plan state, etc.). The logistical data of a group of resources or toolsmay change based on a status change of any one resource or tool, a task,application process, lot of material, or the like. Additionally, manyresources, such as furnaces, for example, are sub-dividable into smallerlogical workgroups arrangements or into process focus area groups.

In display 1100 of FIG. 11, dispatch viewer 1200 includes a plurality ofrows wherein each row contains information about one lot of wafers(Column D) that can be processed by furnace 115 selected (Column A) whenthis output was requested. Dispatch viewer 1200 may suitably be arrangedas on-demand interface so that includes current information.

According to this embodiment, lots may be presented based on highestPriority Class (Column B) without regard to batch size, or availabilityof other qualified tool or resource availability (Column N). The currentcandidate set of lots is shown from which to choose, lots alreadyrunning are not shown. Lots requiring recipes not qualified or otherwiserestricted to a selected tool or resource are not shown (e.g., if aselected tool or resource had a “DOWN” availability within theManufacturing Execution System (“MES”), the associated output would beblank since lot processing requires illustratively an “UP” tool state).For purposes of illustration only, FIG. 11 shows nine lots representingeight recipe choices.

Column A of display 1100 is entitled “Selected Furnace.” Column A uses avariable supplied by a manager wherein results may be filtered withrespect to this selection.

Column B of display 1100 is entitled “Priority Class.” As defined by theDispatching system using formulas related to the time of requesteddelivery, theory of constraints down stream tool loadings, etc. In theabove example Row Number 2 contains a special TURBO priority lot thatoutranks the HOT priority lot shown in Row Number 3.

Column C of display 1100 is entitled “Lot Number.” The Lot Number is aunique identifier for each batch of material that is running within theManufacturing Execution System (“MES”).

Column D of display 1100 is entitled “Lot Name.” The Lot Name is a moreuser friendly identification for a specific lot as defined within theMES.

Column E of display 1100 is entitled “Wafers.” This represents thequantity of silicon slices contained within each lot. Load size ismeasured in terms of wafers. In the above example the lot in Row Number5 is twice the size of the lot in Row Number 2 (i.e., twelve wafersversus twenty four wafers).

Column F of display 1100 is entitled “Diff Plan.” This is the definitionof which furnace has been planned for running the process that is neededfor each lot. The Diff Plan is defined within the MES frequently as aresult of reviewing this report for “conflicting furnaces” (Column N).In the above example Row Number 9 seems to indicate a competitionbetween the furnace S1 and the furnace M4 as both have the same DiffPlan. Upon closer inspection of Full % (Column K) we can determine thatthere is more WIP than one furnace can process (128% in Column K).

Column G of display 1100 is entitled “Script ID.” The Script ID defineswithin the MES which lots can possibly be batched together. Script IDcan almost be thought of as a recipe name. In the above example the lotin Row Number 2 requires a PF1354 recipe while the lots in Row Number 3and in Row Number 4 represent only a portion of the lots available forrecipe PF1508 (Note Full % in column K as only the top portion of thedispatch viewer is being shown).

Column H of display 1100 is entitled “Step.” The Step Number shows therelative position within the script of each lot. Only lots on the samestep of the matching Script ID may be processed simultaneously within afurnace. The Step Number proceeds from low to high within any givenscript. A blank in this column indicates that the lot has not yet begunprocessing on the script.

Column I of display 1100 is entitled “Oper.” The term Oper refers to theOperation Number. The Operation Number indicates where on the MES routethe lot is located. Operation Numbers are a typical manner ofquantifying WIP in the absence of a tool centric approach (e.g.,Bayview).

Column J of display 1100 is entitled “Max Batch.” The Max Batch Numberis the number of silicon slices allowed for the selected tool forsimultaneous processing at the designated script. In the above exampleFurnace S1 can process one hundred fifty (150) wafers from as many lotsas appropriate in many different processes.

Column K of display 1100 is entitled “Full %.” Given the Max Batch size(Column J) and the total number of wafers (Column E) for any givenScript ID (Column G) the percentage of a full load is calculated. Thevalue of the percentage of a full load is then entered in the Full %column (Column K).

Column L of display 1100 is entitled “Hrs at op.” This shows the elapsedtime that the lot (Column C) has already spent at the current operation(Column I). Static lots are easily projected given this time plus therecipe length (Column M).

Column M of display 1100 is entitled “Length.” The value of Lengthrepresents the median process time for the selected furnace (Column A)to complete the recipe (Column G) for a batch material.

Column N of display 1100 is entitled “Candidate Furnaces.” This provideslisting of alternative furnaces that are competing for a given lot. Thisalternative list allows decision making to include “common” versus“restricted” tool sets usage.

Column O of display 1100 is entitled “Hold Category.” The Hold Categorymarker indicates whether the MES has a temporary restriction onprocessing the lot in question.

Although the present invention has been described in detail, thoseskilled in the art should understand that they can make various changes,substitutions and alterations herein without departing from the spiritand scope of the invention in its broadest form.

1. A resource allocator operable to allocate a plurality ofmulti-function resources among a plurality of tasks within a processsystem in semiconductor wafer fabrication, said process system capableof executing at least one application process, said resource allocatorcomprising: a monitoring controller that monitors measurablecharacteristics associated with said at least one application process,said plurality of multi-function resources, and said plurality of tasks,wherein each of said measurable characteristics comprises one of: astatus characteristic and a logistical characteristic; a model of saidprocess system representing mathematically said plurality ofmulti-function resources and said plurality of tasks, and definingrelationships among related ones thereof as a function of said at leastone application process; a resource allocation controller that operatessaid model in response to ones of said monitored measurablecharacteristics and allocates ones of said plurality of multi-functionresources among ones of said plurality of tasks within said processsystem to efficiently execute said at least one application process; anda graphical user interface associated with said resource allocator thatis operable to transform process system information of said resourceallocator into an audio-visual format to enable supervisory interaction.2. The resource allocator as set forth in claim 1 wherein said graphicaluser interface comprises a dispatch viewer.
 3. The resource allocator asset forth in claim 1 wherein said graphical user interface is operableto visualize one of: data of an external resource, status of an externalresource, and on-going transactions within said resource allocator. 4.The resource allocator as set forth in claim 3 wherein said graphicaluser interface is further operable to visualize said one of: data of anexternal resource, status of an external resource, and on-goingtransactions within said resource allocator, by using one of: a graphicdisplay, multimedia equipment, historical information, statisticalinformation, and information input to said graphical user interface bymanagement.
 5. The resource allocator as set forth in claim 1 whereinsaid graphical user interface is further operable to provide informationto said resource allocator to reduce load conflict among multiplefurnaces in semiconductor wafer fabrication.
 6. The resource allocatoras set forth in claim 1 wherein said resource allocation controllerfurther comprises a wetdeck planner application capable of schedulingone of a plurality of wafer lots to one of a plurality of wetdeck units.7. A method of operating a resource allocator to allocate a plurality ofmulti-function resources among a plurality of tasks within a processsystem in semiconductor wafer fabrication, said process system capableof executing at least one application process, said method of operatingsaid resource allocator comprising the steps of: monitoring measurablecharacteristics with a monitoring controller, said measurablecharacteristics associated with said at least one application process,said plurality of multi-function resources, and said plurality of tasks,wherein each of said measurable characteristics comprises one of: astatus characteristic and a logistical characteristic; representingmathematically said plurality of multi-function resources and saidplurality of tasks within a model of said process system, and definingrelationships among related ones thereof as a function of said at leastone application process; operating said model in response to ones ofsaid monitored measurable characteristics, and allocating ones of saidplurality of multi-function resources among ones of said plurality oftasks within said process system using a resource allocation controllerto efficiently execute said at least one application process; andtransforming process system information in a graphical user interfaceassociated with said resource allocator into an audio-visual format toenable supervisory interaction.
 8. The method of operating the resourceallocator as set forth in claim 7 further wherein said graphical userinterface associated with said resource allocator comprises a dispatchviewer.
 9. The method of operating the resource allocator as set forthin claim 7 further comprising a step of visualizing in said graphicaluser interface one of: data of an external resource, status of anexternal resource, and on-going transactions within said resourceallocator.
 10. The method of operating the resource allocator as setforth in claim 9 wherein said step of visualizing one of: said data ofsaid external resource, said status of said external resource, and saidon-going transactions within said resource allocator comprises a stepof: utilizing one of: a graphic display, multimedia equipment,historical information, statistical information, and information inputto said graphical user interface by management.
 11. The method ofoperating the resource allocator as set forth in claim 7 furthercomprising a step of: providing information to said resource allocatorto reduce load conflict among multiple furnaces in semiconductor waferfabrication.
 12. The method of operating the resource allocator as setforth in claim 7 further comprising a step of: scheduling one of aplurality of wafer lots to one of a plurality of wetdeck units with awetdeck planner application.
 13. A wetdeck process system insemiconductor wafer manufacturing, said wetdeck process system capableof executing at least one application process, said wetdeck processsystem comprising: a plurality of process subsystems; a plurality oftasks to be performed within said plurality of process subsystems; aplurality of multi-function resources; and a resource allocator that isoperable to allocate said plurality of multi-function resources amongsaid plurality of tasks, said resource allocator comprising: amonitoring controller that monitors measurable characteristicsassociated with said at least one application process, said plurality ofmulti-function resources, and said plurality of tasks, wherein each ofsaid measurable characteristics comprises one of: a statuscharacteristic and a logistical characteristic; a model of said wetdeckprocess system representing mathematically said plurality ofmulti-function resources and said plurality of tasks, and definingrelationships among related ones thereof as a function of said at leastone application process; a resource allocation controller that operatessaid model in response to ones of said monitored measurablecharacteristics, and allocates ones of said plurality of multi-functionresources among ones of said plurality of tasks within said wetdeckprocess system to efficiently execute said at least one applicationprocess; and a graphical user interface associated with said resourceallocator that is operable to transform process system information ofsaid resource allocator into an audio-visual format to enablesupervisory interaction.
 14. The wetdeck process system as set forth inclaim 13 wherein said graphical user interface comprises a dispatchviewer.
 15. The wetdeck process system as set forth in claim 13 whereinsaid graphical user interface is operable to visualize one of: data ofan external resource, status of an external resource, and on-goingtransactions within said resource allocator.
 16. The wetdeck processsystem as set forth in claim 15 wherein said graphical user interface isfurther operable to visualize said one of: data of an external resource,status of an external resource, and on-going transactions within saidresource allocator, by using one of: a graphic display, multimediaequipment, historical information, statistical information, andinformation input to said graphical user interface by management. 17.The wetdeck process system as set forth in claim 13 wherein saidgraphical user interface is further operable to provide information tosaid resource allocator to reduce load conflict among multiple furnacesin semiconductor wafer fabrication.
 18. The wetdeck process system asset forth in claim 13 wherein said resource allocation controller isoperable to schedule one of a plurality of wafer lots to one of aplurality of wetdeck units.
 19. A resource allocator operable toallocate a plurality of multi-function resources among a plurality oftasks within a wetdeck process, said wetdeck process capable ofexecuting at least one wetdeck process plan, said resource allocatorcomprising: a monitoring controller that monitors measurablecharacteristics associated with said at least one wetdeck process plan,said plurality of multi-function resources, and said plurality of tasks,wherein each of said measurable characteristics comprises one of: astatus characteristic and a logistical characteristic; a model of saidwetdeck process representing mathematically said plurality ofmulti-function resources and said plurality of tasks, and definingrelationships among related ones thereof as a function of said at leastone wetdeck process plan; a resource allocation controller that operatessaid model in response to ones of said monitored measurablecharacteristics and allocates ones of said plurality of multi-functionresources among ones of said plurality of tasks within said wetdeckprocess to efficiently execute said at least one wetdeck process plan;and a graphical user interface associated with said resource allocatorthat is operable to transform process system information of saidresource allocator into an audio-visual format to enable supervisoryinteraction.
 20. The resource allocator as set forth in claim 19 whereinsaid graphical user interface comprises a dispatch viewer.
 21. Theresource allocator as set forth in claim 19 wherein said graphical userinterface is operable to visualize one of: data of an external resource,status on an external resource, and on-going transactions within saidresource allocator.
 22. The resource allocator as set forth in claim 21wherein said graphical user interface is further operable to visualizesaid one of: data of an external resource, status of an externalresource, and on-going transactions within said resource allocator, byusing one of: a graphic display, multimedia equipment, historicalinformation, statistical information, and information input to saidgraphical user interface by management.
 23. The resource allocator asset forth in claim 19 wherein said graphical user interface is furtheroperable to provide information to said resource allocator to reduceload conflict among multiple furnaces in semiconductor waferfabrication.
 24. The resource allocator as set forth in claim 19 whereineach said status characteristic is one of execution data, timing data,alert data, completion data.
 25. The resource allocator as set forth inclaim 19 wherein each said logistical characteristic is one ofassignment data, availability data, capacity data, wetdeck process plandata, prioritization data.
 26. A method of operating a resourceallocator to allocate a plurality of multi-function resources among aplurality of tasks within a wetdeck process, said wetdeck processcapable of executing at least one wetdeck process plan, said method ofoperating said resource allocator comprising the steps of: monitoringmeasurable characteristics with a monitoring controller, said measurablecharacteristics associated with said at least one wetdeck process plan,said plurality of multi-function resources, and said plurality of tasks,wherein each of said measurable characteristics comprises one of: astatus characteristic and a logistical characteristic; representingmathematically said plurality of multi-function resources and saidplurality of tasks within a model of said wetdeck process, and definingrelationships among related ones thereof as a function of said at leastone wetdeck process plan; operating said model in response to ones ofsaid monitored measurable characteristics, and allocating ones of saidplurality of multi-function resources among ones of said plurality oftasks within said wetdeck process using a resource allocation controllerto efficiently execute said at least one wetdeck process plan; andtransforming process system information in a graphical user interfaceassociated with said resource allocator into an audio-visual format toenable supervisory interaction.
 27. The method of operating a resourceallocator as set forth in claim 26 wherein said graphical user interfacecomprises a dispatch viewer.
 28. The method of operating a resourceallocator as set forth in claim 26 further comprising a step ofvisualizing in said graphical user interface one of: data of an externalresource, status of an external resource, and on-going transactionswithin said resource allocator.
 29. The method of operating a resourceallocator as set forth in claim 28 wherein said step of visualizing oneof: said data of said external resource, said status of said externalresource, and said on-going transactions within said resource allocatorcomprises a step of: utilizing one of: a graphic display, multimediaequipment, historical information, statistical information, andinformation input to said graphical user interface by management. 30.The method of operating a resource allocator as set forth in claim 26further comprising a step of: providing information to said resourceallocator to reduce load conflict among multiple furnaces insemiconductor wafer fabrication.
 31. The method of operating a resourceallocator as set forth in claim 26 wherein each said statuscharacteristic is one of execution data, timing data, alert data,completion data.
 32. The method of operating a resource allocator as setforth in claim 26 wherein each said logistical characteristic is one ofassignment data, availability data, capacity data, wetdeck process plandata, prioritization data.